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FSI International : ウィキペディア英語版
FSI International

FSI International, Inc. (FSI) was set up in 1973 and is based in Chaska, Minnesota. The company engaged in the market of equipment widely used in the fabrication of microelectronics. 2012.10, Tokyo Electron Limited Completes Acquisition of FSI International, Inc. In 1999, FSI International announced definitive agreement to acquir YieldUP International Corp.
== Products ==
FSI International supplied surface conditioning technology solutions, using wet, cryogenic and other chemistry techniques to clean, strip or etch the surfaces of silicon wafers. The Company also engaged in microlithography systems for photoresist, light-sensitive, and etch-resistant films. The company provides upgrade, replacement and other support services.
There are four main bands in the company: ZETA, MERCURY, ORION, ANTARES, and POLARIS. Some of the products of the company are spray cleaning systems, single wafer cleaning systems, cryogenic processing systems, and immersion cleaning systems.

抄文引用元・出典: フリー百科事典『 ウィキペディア(Wikipedia)
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